KARMEN™ - retractable BSE detector for hot stage

KARMEN™ - retractable BSE detector for hot stage
Retractable BSE detector for SEM for hot stage samples

Key properties

RELIABLE SENSOR PRECISE MECHANICS
  • Single crystal sensor

  • Scintillator/PMT principle for ultimate image quality

  • Excellent S/N ratio

  • Unlimited sensor lifetime

  • HV + LV + ESEM operation

  • Sample temperature over 1000°C

  • Motorized retraction mechanism

  • Bellows-sealed high vacuum system

  • Retraction 140 mm

  • Compact design

  • Precise alignment

  • Customized connection to SEM

Heat management

SENSOR HEAT MANAGEMENT

  • Sample temperature 1000°C
  • Passive cooling by heat-pipe technology
  • Temperature monitoring of the sensor

SENSOR SHIELDING

  • Sensor and lightguide cooled and
    shielded against infrared and visible
    light emited by the heated sample

Technical parameters

  • SENSOR UNIT

single crystal scintillator with optimized efficiency and minimized afterglow, exponential decay time 45 ns with 30 photons/keV

Outer diameter 15 mm

Inner hole diameter 3 / 2 / 1.5 or 1 mm. This dimension limits the field of view

Exclusive CRYTUR LOW-ENERGY COATING™ sensitive down to 0.2 keV

Sensitivity down to 10pA beam current

Allows a 7 mm working distance

 

  • MECHANICAL UNIT

 

Dimensions 406 x 100 x 72 mm

Bellows design for ultimate vacuum

140 mm motorized retraction

+/- 2 mm fine adjustment in x, y, z axis

0.01 mm repeatability

Flange adapted to customer's SEM

Silver / black / blue / red matt surface finish available

 

  • ELECTRONICS CONTROL UNIT

Dimensions 270 x 180 x 65 mm

Supply 230/110 V

3 noise filters optimized for different scanning speeds

50 MHz bandwidth

Internal source 0-1200 V for PMT HV

Output video signal -1/+1V (-5/+5V)

Full remote software control

DC offset up to -20V